Shadow mask and method of fabricating organic light-emitting device using the same

ABSTRACT

A shadow mask and a method of fabricating an OLED display using the same is disclosed, wherein the shadow mask is not sagging, and the shadow mask includes a plurality of columns, each column including a plurality of first or second cell-forming parts, wherein the first and second cell-forming parts are alternately arranged in the columns, and the first and second cell-forming parts provided in the adjacent columns include transmission parts having the different open directions.

This application claims the benefit of Korean Patent Application No.2006-60610 filed on Jun. 30, 2006, which is hereby incorporated byreference for all purposes as if fully set forth herein.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an organic light-emitting diode, andmore particularly, to a shadow mask which is not sagging, and a methodof fabricating an organic light-emitting diode (OLED) display deviceusing the shadow mask.

2. Discussion of the Related Art

One of various flat panel displays, an organic light-emitting diode(OLED) display, emits light by itself. In comparison to a liquid crystaldisplay (LCD) device, the OLED display has the advantageous propertiesof wide viewing angle and high contrast ratio. It is unnecessary for theOLED display to provide a backlight unit, so that the OLED displayrealizes thin profile, light in weight and low power consumption.

Furthermore, the OLED display is driven by a low voltage, and the OLEDdisplay has a rapid response speed. Also, the OLED display is fabricatedwith a solid matter, whereby the OLED display can endure the externalimpact and can be used in the wide scope of temperature. Especially, theOLED display may be fabricated only by deposition and encapsulationapparatuses, so that a method of fabricating the OLED display issimplified.

When the OLED display is driven in an active matrix type where eachpixel includes a thin film transistor of a switching element, the sameluminance can be realized even in case of applying a low current,thereby obtaining the low power consumption, fineness, and large size ofthe device.

The OLED display displays images by exciting a fluorescent materialusing carriers including electrons and holes.

In the meantime, the OLED display is generally driven in a passivematrix type having no additional thin film transistor. However, thepassive matrix type has limitations on the lower consumption andlifespan of device. Thus, there are researches and studies for an activematrix type OLED display which is suitable for a next-generation displayrequiring high resolution and large size.

The OLED display is divided into a lower light-emitting mode and anupper light-emitting mode based on whether an organic light-emittinglayer is positioned on a lower substrate or an upper substrate. Forexample, when realizing the active matrix type in the upperlight-emitting mode, a thin film transistor array is provided on thelower substrate and the light-emitting layer is positioned on the uppersubstrate, it is referred to as a dual plate type OLED (DOD) display.

Hereinafter, a related art OLED display will be described with referenceto the accompanying drawings.

FIG. 1 is a cross section view of illustrating a related art OLEDdisplay. Referring to FIG. 1, the related art OLED display includes afirst substrate 10, a second substrate 20, a thin film transistor arrayincluding a thin film transistor (TFT) in each sub pixel of the firstsubstrate 10, an organic light-emitting diode (E) formed on the secondsubstrate 20, and a seal pattern 30 formed in the circumference of firstand second substrates 10 and 20. To supply a current to the organiclight-emitting diode (E), there are a transparent electrode 16 and aconnector 17 which connects the thin film transistor (TFT) to a secondelectrode 25 by each sub pixel.

At this time, the organic light-emitting diode (E) includes a firstelectrode 21 which functions as a common electrode, a second electrodeseparator 26 which is positioned in the boundaries of every sub pixelabove the first electrode 21, organic light-emitting layers 22, 23 and24, and the second electrode 25. In order to form the organiclight-emitting diode (E), the first electrode 21, the second electrodeseparator 26, the organic light-emitting layers 22, 23 and 24 and thesecond electrode 25 are deposited in sequence, and then the organiclight-emitting layers 22, 23 and 24 and the second electrode 25 areseparated by the second electrode separator provided on the boundariesof every sub pixel.

At this time, the organic light-emitting layer includes a firstcarrier-transmitting layer 22, a light-emitting layer 23, and a secondcarrier-transmitting layer 24, which are deposited in sequence. Thefirst and second carrier-transmitting layers 22 and 24 inject andtransport electrons or holes to the light-emitting layer 23.

The first and second carrier-transmitting layers 22 and 24 aredetermined based on the position of anode and cathode. For example,supposing that the light-emitting layer 23 is selected from a highmolecular substance, the first electrode 21 serves as the anode, and thesecond electrode 25 serves as the cathode. In this case, the firstcarrier-transmitting layer 22 which is positioned adjacent to the firstelectrode 21 includes a hole injection layer and a hole transportinglayer deposited in sequence, and the second carrier-transmitting layer24 which is positioned adjacent to the second electrode 25 includes anelectron injection layer and an electron transporting layer deposited insequence.

Also, the first and second carrier-transmitting layers 22 and 24 and thelight-emitting layer 23 may be formed of the high molecular substance orlow molecular substance. When using the low molecular substance, theyare formed by a vacuum deposition method. Meanwhile, when using the highmolecular substance, they are formed by an ink jet method.

Unlike a general spacer for the LCD device, a conductive spacer 17functions as an electric connector between the two substrates as well ascell-gap maintenance. The conductive spacer 17 has a predeterminedheight between the two substrates.

The thin film transistor (TFT) corresponds to a driving thin filmtransistor connected to the organic light-emitting diode (E). The thinfilm transistor (TFT) includes a gate electrode 11 which is formed on apredetermined portion of the first substrate 10, a semiconductor layer13 which is formed in shape of an island to cover the gate electrode 11,and source and drain electrodes 14 a and 14 b which are formed at bothsides of the semiconductor layer 13. In addition, a gate insulationlayer 12 is formed on an entire surface of the first substrate 10,wherein the gate insulation layer 12 is interposed between the gateelectrode 11 and the semiconductor layer 13. Then, a passivation layeris formed on the gate insulation layer 12 including the source and drainelectrodes 14 a and 14 b. At this time, the drain electrode 14 b iselectrically connected to the transparent electrode 16 formed on thepassivation layer 15 through a contact hole formed in the passivationlayer 15. The upper side of transparent electrode 16 is brought intocontact with the conductive spacer 17.

The conductive spacer 17 electrically connects the drain electrode 14 bof thin film transistor (TFT) provided by each sub pixel to the secondelectrode 25 formed on the second substrate 20. The conductive spacer 17is formed by coating a column-shaped spacer of organic insulationmaterial with a metal material. The sub pixels of first substrate 10 areelectrically connected to the sub pixels of second substrate 20 by aone-to-one correspondence.

The metal material for the conductive spacer 17 is selected from aconductive material, preferably, a metal material having the softnessand low resistance value. At this time, the first electrode 21 is formedof a transparent electrode material, and the second electrode 25 isformed of a light-shielding metal layer. Also, the interval between thefirst and second substrates 10 and 20 may be filled with an inert gas oran insulating liquid.

Although not shown, the first substrate 10 includes a scanning line, asignal line crossing the scanning line at a predetermined interval witheach other, a power supplying line and a storage capacitor.

For a dual plate type OLED display, there is a bus line formed in shapeof a grid on the first electrode 21 of a transparent electrode materialhaving a high resistivity. The bus line prevents a voltage value frombeing lowered on the first electrode 21.

In the meantime, the organic light-emitting layer is formed on thesecond substrate 20. The organic light-emitting layer is formed of anorganic light-emitting material which emits a predetermined light, forexample R, G and B light, for each sub pixel.

FIG. 2 is a plane view of illustrating a shadow mask to form the relatedart OLED display.

As shown in FIG. 2, the shadow mask 40 is provided with a plurality ofcell-forming parts 45, wherein the plurality of cell-forming parts 45are regularly arranged in the same direction at fixed intervals. Each ofthe cell-forming parts 45 formed in the shadow mask 40 is provided witha plurality of transmission parts 51 which correspond to R, G and Borganic light-emitting layers. At this time, the line width of each ofthe transmission parts 51 is identical to the line width of each of theR, G and B organic light-emitting layers.

The plurality of transmission parts 51 provided in each of thecell-forming parts 45 are formed in the same direction at fixedintervals. Except the transmission parts 51, the other portions ofshadow mask 40 are defined with a masking part 41.

Each of the cell-forming parts 45 is identical in size to one cellcorresponding to one OLED display, wherein one cell is provided with aplurality of pixels.

In the process of fabricating the OLED display using the related artshadow mask 40, the organic light-emitting layer is formed on thesubstrate through each of the transmission parts 51 of the shadow mask40. At this time, when the shadow mask 40 is held by the evaporationapparatus, and is maintained by a predetermined space from theevaporation apparatus for a preset period of time, the central portionof shadow mask 40 or the other portion adjacent to the transmission partmay be sagging due to the gravity.

Especially, as shown in FIG. 2, when using the shadow mask 40 includingthe plurality of cell-forming parts, a slit type is more advantageousthan a slot type having a transmission part in a corresponding pixel inthat the slit is easily formed in desired size without decrease in widthof the organic light-emitting layer. In this case, the mask is moreseverely sagged in a length direction of the transmission part due tothe large length of slit, wherein the length of the silt iscorresponding to that of the transmission part.

The related art shadow mask has the following disadvantages.

When using the shadow mask 40 including the plurality of cell-formingparts, the slit type is more advantageous than the slot type having thetransmission part in the corresponding pixel in that the slit is easilyformed in desired size without decrease in width of the organiclight-emitting layer. In this case, the mask is more severely sagged dueto the large length of slit.

The organic light-emitting layer of OLED display is formed by theevaporation deposition method. In this case, the organic light-emittinglayer is formed on the portion exposed by the shadow mask. At this time,when the shadow mask 40 is held by the evaporation apparatus, and ismaintained by the predetermined space from the evaporation apparatus fora preset period of time, the central portion of shadow mask or the otherportion adjacent to the transmission part may be sagging due to thegravity. As the shadow mask is sagging, it is difficult to form theorganic light-emitting layer normally. Accordingly, the organiclight-emitting layer may be larger or smaller than the desired size, ormay be formed in the other portion being apart from the desired portion.Especially, if the transmission parts of shadow mask are provided withthe long slits formed at the same direction, the shadow mask may be moreseverely sagging.

In order to overcome this problem, a magnetic force may be applied tothe shadow mask which is formed of the metal material, to thereby liftup the shadow mask. However, there is a requirement for providing anadditional apparatus to apply the magnetic force to the shadow mask,thereby increasing the fabrication costs of the device.

SUMMARY OF THE INVENTION

Accordingly, the present invention is directed to a shadow mask and amethod of fabricating an OLED display using the same that substantiallyobviates one or more problems due to limitations and disadvantages ofthe related art.

An advantage of the present invention is to provide a shadow mask whichis not sagging, and a method of fabricating an organic light-emittingdiode (OLED) display device using the shadow mask.

Additional features and advantages of the invention will be set forth inthe description which follows, and in part will be apparent from thedescription, or may be learned by practice of the invention. These andother advantages of the invention will be realized and attained by thestructure particularly pointed out in the written description and claimshereof as well as the appended drawings.

To achieve these and other advantages and in accordance with the purposeof the invention, as embodied and broadly described herein, a shadowmask includes a plurality of columns, each column including a pluralityof first or second cell-forming parts, wherein the first and secondcell-forming parts are alternately arranged in the columns, and thefirst and second cell-forming parts provided in the adjacent columnsinclude a plurality of transmission parts having different opendirections.

At this time, the transmission parts provided in the cell-forming partsfor each column have the same open direction.

Also, the column provided with the transmission parts having the firstdirection alternates with the column provided with the transmissionparts having the second direction.

Also, the first and second directions cross each other.

Also, the first direction is orthogonal to the second direction.

In another aspect, a shadow mask includes a plurality of columns androws, each column including a plurality of first or second cell-formingparts, each cell-forming part including a plurality of transmissionparts, wherein the first cell-forming parts are positioned in theodd-numbered rows, and the second cell-forming parts are positioned inthe even-numbered rows.

At this time, the transmission parts provided in the cell-forming partsfor each column have the same open direction.

Also, the transmission parts provided in the cell-forming parts for thecolumns have the same open direction.

Also, the first cell-forming parts provided with the transmission partshaving the first direction alternate with the second cell-forming partsprovided with the transmission parts having the second direction.

Also, the first and second directions cross each other.

Also, the first direction is orthogonal to the second direction.

In another aspect, a method of fabricating an OLED display includespreparing a shadow mask including a plurality of columns, each columnincluding a plurality of first or second cell-forming parts, wherein thefirst and second cell-forming parts are alternately arranged in thecolumns, and the first and second cell-forming parts provided in theadjacent columns include a plurality of transmission parts havingdifferent open directions; positioning the shadow mask below asubstrate; and forming an organic light-emitting layer by supplying anorganic light-emitting material layer from an organic light-emittingmaterial supplier positioned below the shadow mask to the substratethrough the transmission parts of shadow mask.

In another aspect, a method of fabricating an OLED display includespreparing a shadow mask including a plurality of columns and rows, eachcolumn including a plurality of first or second cell-forming parts, eachcell-forming part including a plurality of transmission parts, whereinthe first cell-forming parts are positioned in the odd-numbered rows,and the second cell-forming parts are positioned in the even-numberedrows; positioning the shadow mask below a substrate; and forming anorganic light-emitting layer by supplying an organic light-emittingmaterial layer from an organic light-emitting material supplierpositioned below the shadow mask to the substrate through thetransmission parts of shadow mask.

It is to be understood that both the foregoing general description andthe following detailed description are exemplary and explanatory and areintended to provide further explanation of the invention as claimed.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are included to provide a furtherunderstanding of the invention and are incorporated in and constitute apart of this specification, illustrate embodiments of the invention andtogether with the description serve to explain the principles of theinvention.

In the drawings:

FIG. 1 is a cross section view of illustrating a dual plate type OLEDdisplay according to the related art;

FIG. 2 is a plane view of illustrating a shadow mask to fabricate anOLED display according to the related art;

FIG. 3 is a plane view of illustrating a shadow mask according to thefirst embodiment of the present invention;

FIG. 4 is a plane view of illustrating a shadow mask according to thesecond embodiment of the present invention; and

FIG. 5 is a view of illustrating a method of fabricating an organiclight-emitting layer of OLED display using a shadow mask according tothe preferred embodiment of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

Reference will now be made in detail to embodiments of the presentinvention, examples of which are illustrated in the accompanyingdrawings. Wherever possible, the same reference numbers will be usedthroughout the drawings to refer to the same or like parts.

FIG. 3 is a plane view of illustrating a shadow mask of an OLED displayaccording to the first embodiment of the present invention.

As shown in FIG. 3, the shadow mask according to the first embodiment ofthe present invention is defined with a plurality of columns. Along eachof the columns, there are a plurality of first or second cell-formingparts 110 or 120, wherein each of first and second cell-forming parts110 and 120 is provided with a plurality of transmission parts 111. Atthis time, the transmission parts 111 provided in the adjacent columnsare perpendicular with each other. For example, the transmission partprovided in the even-numbered column is perpendicular to thetransmission part provided in the odd-numbered column. For the samecolumn, the transmission parts 111 are arranged in the same direction.Referring to FIG. 3, along the same column of shadow mask 100, thetransmission parts 111 positioned in the adjacent cell-forming parts 110or 120 may be arranged in the same vertical line or in the differentvertical lines.

On the assumption that the shadow mask 100 includes ‘n’ columns, thefirst cell-forming part 110 having the transmission part 111 of a firstdirection is formed in the first column; and the second cell-formingpart 120 having the transmission part 121 of a second direction isformed in the second column. In this case, the open direction of eachtransmission part 111 provided in the first column is different from theopen direction of each transmission part 121 provided in the secondcolumn.

The first direction of the transmission part 111 provided in the firstcell-forming part of the first column may be orthogonal or slant to thesecond direction of the transmission part 121 provided in the secondcell-forming part of the second column. As the transmission part 111provided in the first cell-forming part 110 is provided at the differentdirection as the transmission part 121 provided in the secondcell-forming part 120, it is possible to compensate for the shadow masksagging at the different directions. Especially, it is possible toprevent the sag in the central portion of shadow mask caused by thegravity.

At this time, the transmission parts 111 and 121 are formed as the opentype. Except the transmission parts, the other portions of shadow mask100 are defined with a masking part 101. In an evaporation deposition, amaterial is evaporated and is then deposited on a substrate (not shown)through the transmission parts 111 and 121 of shadow mask. In case ofthe masking part 101, the evaporated material is not transmittedtherethrough.

In the first embodiment of the present invention, the shadow mask 100has the first and second cell-forming parts which are different fromeach other. This is because the shadow mask is more severely sagging dueto the increased open area caused by the transmission parts arranged inthe same direction on the slit type.

In this respect, the shadow mask 100 according to the first embodimentof the present invention has both the transmission part 111 having thefirst direction and the transmission part 121 having the seconddirection, wherein the odd-numbered column having the transmission part111 of the first direction alternates with the even-numbered columnhaving the transmission part 121 of the second direction, therebypreventing the shadow mask from sagging due to the tension of apredetermined direction.

FIG. 4 is a plane view of illustrating a shadow mask according to thesecond embodiment of the present invention.

Referring to FIG. 4, the shadow mask 200 according to the secondembodiment of the present invention is defined with a plurality ofcolumns and rows. Along each of the columns, there are a plurality offirst or second cell-forming parts 210 or 220, wherein each of the firstand second cell-forming parts 210 and 220 is provided with a pluralityof transmission parts 211. At this time, the first cell-forming parts210 are positioned in the odd-numbered row of shadow mask 200; and thesecond cell-forming parts 220 are positioned in the even-numbered row ofshadow mask 200. Also, the transmission parts 211 of the first andsecond cell-forming parts 210 and 220 are arranged in the samedirection.

Although not shown, the first cell-forming part is provided with a firstdirection, and the second cell-forming part is provided with a seconddirection, wherein the first direction of first cell-forming part isdifferent from the second direction of second cell-forming part. Forexample, when providing the plurality of cell-forming parts based on thearrangement of FIG. 4, the first direction of first cell-forming partmay be orthogonal or slant to the second direction of secondcell-forming part.

A method of fabricating an OLED display using the shadow mask 200according to the second embodiment of the present invention will bedescribed as follows.

First, the shadow mask 200 is prepared, which is defined with theplurality of columns and rows. Along each of the columns provided in theshadow mask 200, there are the plurality of first or second cell-formingparts 210 or 220, wherein each of the first and second cell-formingparts 210 and 220 is provided with the plurality of transmission parts211. At this time, the first cell-forming parts 210 are positioned inthe odd-numbered row of shadow mask 200; and the second cell-formingparts 220 are positioned in the even-numbered row of shadow mask 200.Also, the transmission parts 211 of the first and second cell-formingparts 210 and 220 are arranged in the same direction.

Then, the shadow mask 200 is positioned below the substrate (not shown),and an organic light-emitting material supplier is positioned below theshadow mask 200. Thus, the organic light-emitting material suppliersupplies an organic light-emitting material to the substrate (not shown)through the transmission parts of shadow mask, whereby the organiclight-emitting material is formed on the substrate.

FIG. 5 is a view of illustrating a method of fabricating the organiclight-emitting layer of OLED display using the shadow mask according toan embodiment of the present invention.

As shown in FIG. 5, the organic light-emitting material to emit thepredetermined-colored light to the transmission part 111 of the shadowmask 100 or 200 is evaporated so that a first organic light-emittinglayer 310 is formed. At this time, an organic light-emitting materialsupplier 410 to supply the organic light-emitting material is positionedbelow the shadow mask 100. Also, the organic light-emitting material issupplied in the vapor state at a high temperature. Thus, the vapor oflight-emitting material is adhered onto the surface of the exposedsubstrate 300. In this case, the outer side of shadow mask 100 issupported by a frame 400, whereby the shadow mask 100 is positionedabove the organic light-emitting material supplier 410 and below thesubstrate 300.

As shown in FIG. 5, the first organic light-emitting layer 310 is formedin the corresponding sub pixel after forming second and third organiclight-emitting layers 320 and 330 in the other sub pixels. To form thesecond and third organic light-emitting layers 320 and 330, the sameshadow mask 100 is shifted by one sub pixel or two sub pixels.

A method of forming the organic light-emitting layer of OLED displayusing the shadow mask 100 will be described as follows.

First, the shadow mask 100 is prepared, which is positioned below thesubstrate. Also, the organic light-emitting material supplier 410 ispositioned below the shadow mask 100. Then, the organic light-emittingmaterial is supplied to the substrate through the transmission parts ofthe shadow mask 100, whereby the corresponding organic light-emittinglayer is formed on the predetermined portion of the substrate 300.

The shadow mask 100 according to the first or second embodiment of thepresent invention may be used. For the shadow mask 100 according to thefirst embodiment of the present invention, there are the plurality ofcolumns, and there are the plurality of first or second cell-formingparts along each of the columns, wherein each of the first and secondcell-forming parts is provided with the plurality of transmission parts,and the transmission parts provided in the adjacent columns areperpendicular with each other.

For the shadow mask according to the second embodiment of the presentinvention, there are the plurality of columns and rows, and there arethe plurality of first or second cell-forming parts along each of thecolumns, each of the first and second cell-forming parts provided with aplurality of transmission parts, wherein the first cell-forming partsare positioned in the odd-numbered row of shadow mask; the secondcell-forming parts are positioned in the even-numbered row of shadowmask; and the transmission parts of the first and second cell-formingparts are arranged in the same direction.

As mentioned above, the shadow mask according to the present inventionand the method of fabricating the OLED display using the shadow maskhave the following advantages.

For the related art shadow mask, the central portion of shadow mask maybe sagging more than the edge of shadow mask due to the gravity appliedto the shadow mask. Especially, if the transmission parts of shadow maskare provided in the slit types, the open directions of the transmissionparts are the same, so that the shadow mask is more severely sagging dueto the slit-type transmission parts.

In the meantime, the slit-type shadow mask according to the presentinvention includes the plurality of columns and rows. Along each of thecolumns, there are the plurality of first or second cell-forming parts,wherein each of first and second cell-forming parts is provided with aplurality of transmission parts. At this time, the open directions ofthe transmission parts provided in the adjacent columns are differentfrom each other, thereby strengthening the tension of the shadow mask.As a result, it is possible to prevent the shadow mask from saggingdown.

It will be apparent to those skilled in the art that variousmodifications and variation can be made in the present invention withoutdeparting from the spirit or scope of the invention. Thus, it isintended that the present invention cover the modifications andvariations of this invention provided they come within the scope of theappended claims and their equivalents.

1. A shadow mask comprising a plurality of columns, each columnincluding a plurality of first or second cell-forming parts, wherein thefirst and second cell-forming parts are alternately arranged in thecolumns, and the first and second cell-forming parts provided in theadjacent columns include a plurality of transmission parts havingdifferent open directions.
 2. The shadow mask of claim 1, wherein thetransmission parts provided in the cell-forming parts for each columnhave the same open direction.
 3. The shadow mask of claim 2, wherein thecolumn provided with the transmission parts having the first directionalternates with the column provided with the transmission parts havingthe second direction.
 4. The shadow mask of claim 3, wherein the firstand second directions cross each other.
 5. The shadow mask of claim 4,wherein the first direction is orthogonal to the second direction.
 6. Ashadow mask comprising a plurality of columns and rows, each columnincluding a plurality of first or second cell-forming parts, eachcell-forming part including a plurality of transmission parts, whereinthe first cell-forming parts are positioned in the odd-numbered row, andthe second cell-forming parts are positioned in the even-numbered row.7. The shadow mask of claim 6, wherein the transmission parts providedin the cell-forming parts for each column have the same open direction.8. The shadow mask of claim 7, wherein the transmission parts providedin the cell-forming parts for the columns have the same open direction.9. The shadow mask of claim 7, wherein the first cell-forming partsprovided with the transmission parts having the first directionalternate with the second cell-forming parts provided with thetransmission parts having the second direction.
 10. The shadow mask ofclaim 9, wherein the first and second directions cross each other. 11.The shadow mask of claim 10, wherein the first direction is orthogonalto the second direction.
 12. A method of fabricating an OLED displaycomprising: preparing a shadow mask including a plurality of columns,each column including a plurality of first or second cell-forming parts,wherein the first and second cell-forming parts are alternately arrangedin the columns, and the first and second cell-forming parts provided inthe adjacent columns include a plurality of transmission parts havingdifferent open directions; positioning the shadow mask below asubstrate; and forming an organic light-emitting layer by supplying anorganic light-emitting material layer from an organic light-emittingmaterial supplier positioned below the shadow mask to the substratethrough the transmission parts of the shadow mask.
 13. A method offabricating an OLED display comprising: preparing a shadow maskincluding a plurality of columns and rows, each column including aplurality of first or second cell-forming parts, each cell-forming partincluding a plurality of transmission parts, wherein the firstcell-forming parts are positioned in the odd-numbered rows, and thesecond cell-forming parts are positioned in the even-numbered rows;positioning the shadow mask below a substrate; and forming an organiclight-emitting layer by supplying an organic light-emitting materiallayer from an organic light-emitting material supplier positioned belowthe shadow mask to the substrate through the transmission parts ofshadow mask.